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2019-09-18 11:48:34 Á¶È¸ :2650



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Item °ø¶õÀ» Ŭ¸¯ÇϽøé À§¿Í °°ÀÌ Ç׸ñµéÀÌ ³ªÅ¸³³´Ï´Ù.

Grating spacing (GSP)°ú Alpha tilt angle(TLA)À» ¼±ÅÃÇØÁÝ´Ï´Ù.





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À§¿Í °°ÀÌ ¼¼ âÀÌ ¶å´Ï´Ù. Layout°ú Spot diagram, slider âÀÔ´Ï´Ù.

Slider¸¦ ÁÂ/¿ì·Î ¿òÁ÷À̸ç layout°ú spotÀÇ º¯È­¸¦ º¼ ¼ö ÀÖ½À´Ï´Ù.





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